- Table I-2 to Subpart I of Part 98—Examples of Fluorinated GHGs Used by the Electronics Industry

Link to an amendment published at 89 FR 31919, Apr. 25, 2024.
Product type Fluorinated GHGs and fluorinated heat transfer fluids used during manufacture ElectronicsCF4, C2F6, C3F8, c-C4F8, c-C4F8O, C4F6, C5F8, CHF3, CH2F2, NF3, SF6, and fluorinated HTFs (CF3-(O-CF(CF3)-CF2)n-(O-CF2)m-O-CF3, CnF2n + 2, CnF2n + 1(O)CmF2m + 1, CnF2.O, (CnF2n + 1)3N).
[77 FR 10381, Feb. 22, 2012]