- Table I-17 to Subpart I of Part 98—Expected and Possible By-Products for Electronics Manufacturing

For each stack system for which you use the “stack test method” to calculate annual emissions, you must measure the following: If emissions are detected intermittently, use the
following procedures:
If emissions are not detected, use the
following procedures:
Expected By-products:
CF4
C2F6
CHF3
CH2F2
CH3F
Use the measured concentration for “Xksm” in Equation I-18 when available and use one-half of the field detection limit you determined for the fluorinated GHG according to § 98.94(j)(2) for the value of “Xksm” when the fluorinated GHG is not detectedUse one-half of the field detection limit you determined for the fluorinated GHG according to § 98.94(j)(2) for the value of “Xksm” in Equation I-18. Possible By-products:
C3F8
C4F6
c-C4F8
C5F8
Use the measured concentration for “Xksm” in Equation I-18 when available and use one-half of the field detection limit you determined for the fluorinated GHG according to § 98.94(j)(2) for the value of “Xksm” when the fluorinated GHG is not detectedAssume zero emissions for that fluorinated GHG for the tested stack system.
[78 FR 68234, Nov. 13, 2013]