(a) You must report GHG emissions under this subpart if electronics manufacturing production processes, as defined in § 98.90, are performed at your facility and your facility meets the requirements of either § 98.2(a)(1) or (2). To calculate total annual GHG emissions for comparison to the 25,000 metric ton CO2e per year emission threshold in § 98.2(a)(2), follow the requirements of § 98.2(b), with one exception. Rather than using the calculation methodologies in § 98.93 to calculate emissions from electronics manufacturing production processes, calculate emissions of each fluorinated GHG from electronics manufacturing production processes by using paragraph (a)(1), (2), or (3) of this section, as appropriate, and then sum the emissions of each fluorinated GHG and account for fluorinated heat transfer fluid emissions by using paragraph (a)(4) of this section.
(1) If you manufacture semiconductors or MEMS you must calculate annual production process emissions resulting from the use of each input gas for threshold applicability purposes using either the default emission factors shown in table I-1 to this subpart and equation I-1A to this section, or the consumption of each input gas, the default emission factors shown in table I-2 to this subpart, and equation I-1B to this section.
Where:
Ei = Annual production process emissions of gas i for threshold applicability purposes (metric tons CO2e).
S = 100 percent of annual manufacturing capacity of a facility as calculated using equation I-5 to this section (m
2).
EFi = Emission factor for gas i (kg/m
2) shown in table I-1 to this subpart.
GWPi = Gas-appropriate GWP as provided in table A-1 to subpart A of this part.
0.001 = Conversion factor from kg to metric tons.
i = Emitted gas.
Where:
Ei = Annual production process emissions resulting from the use of input gas i for threshold applicability purposes (metric tons CO2e).
Ci = Annual GHG (input gas i) purchases or consumption (kg). Only gases that are used in semiconductor or MEMS manufacturing processes listed at § 98.90(a)(1) through (4) must be considered for threshold applicability purposes.
(1-Ui), BCF4, and BC2F6 = Default emission factors for the gas consumption-based threshold applicability determination listed in table I-2 to this subpart.
GWPi = Gas-appropriate GWP as provided in table A-1 to subpart A of this part.
0.001 = Conversion factor from kg to metric tons.
i = Input gas. (2) If you manufacture LCDs, you must calculate annual production process emissions resulting from the use of each input gas for threshold applicability purposes using either the default emission factors shown in table I-1 to this subpart and equation I-2A to this section or the consumption of each input gas, the default emission factors shown in table I-2 to this subpart, and equation I-2B to this section.
Where:
Ei = Annual production process emissions of gas i for threshold applicability purposes (metric tons CO2e).
S = 100 percent of annual manufacturing capacity of a facility as calculated using equation I-5 to this section (m
2).
EFi = Emission factor for gas i (g/m
2).
GWPi = Gas-appropriate GWP as provided in table A-1 to subpart A of this part.
0.000001 = Conversion factor from g to metric tons.
i = Emitted gas.
Where:
Ei = Annual production process emissions resulting from the use of input gas i for threshold applicability purposes (metric tons CO2e).
Ci = Annual GHG (input gas i) purchases or consumption (kg). Only gases that are used in LCD manufacturing processes listed at § 98.90(a)(1) through (4) must be considered for threshold applicability purposes.
(1-Ui), BCF4, and BC2F6 = Default emission factors for the gas consumption-based threshold applicability determination listed in table I-2 to this subpart.
GWPi = Gas-appropriate GWP as provided in table A-1 to subpart A of this part.
0.001 = Conversion factor from kg to metric tons.
i = Input gas. (3) If you manufacture PVs, you must calculate annual production process emissions resulting from the use of each input gas i for threshold applicability purposes using gas-appropriate GWP values shown in table A-1 to subpart A of this part, the default emission factors shown in table I-2 to this subpart, and equation I-3 to this section.
Where:
Ei = Annual production process emissions resulting from the use of input gas i for threshold applicability purposes (metric tons CO2e).
Ci = Annual fluorinated GHG (input gas i) purchases or consumption (kg). Only gases that are used in PV manufacturing processes listed at § 98.90(a)(1) through (4) must be considered for threshold applicability purposes.
(1 - Ui), BCF4, and BC2F6 = Default emission factors for the gas consumption-based threshold applicability determination listed in table I-2 to this subpart.
GWPi = Gas-appropriate GWP as provided in table A-1 to subpart A of this part.
0.001 = Conversion factor from kg to metric tons.
i = Input gas. (4) You must calculate total annual production process emissions for threshold applicability purposes using equation I-4 to this section.
Where:
ET = Annual production process emissions of all fluorinated GHGs for threshold applicability purposes (metric tons CO2e).
δ = Factor accounting for fluorinated heat transfer fluid emissions, estimated as 10 percent of total annual production process emissions at a semiconductor facility. Set equal to 1.1 when equation I-4 to this section is used to calculate total annual production process emissions from semiconductor manufacturing. Set equal to 1 when equation I-4 to this section is used to calculate total annual production process emissions from MEMS, LCD, or PV manufacturing.
Ei = Annual production process emissions of gas i for threshold applicability purposes (metric tons CO2e), as calculated in equations I-1a, I-1b, I-2a, I-2b, or I-3 to this section.
i = Emitted gas. (b) You must calculate annual manufacturing capacity of a facility using equation I-5 to this section.
Where:
S = 100 percent of annual manufacturing capacity of a facility (m
2).
WX = Maximum substrate starts of fab f in month x (m
2 per month).
x = Month. [75 FR 74818, Dec. 1, 2010, as amended at 77 FR 10380, Feb. 22, 2012; 78 FR 68202, Nov. 13, 2013; 89 FR 31905, Apr. 25, 2024]